Fundamentals of microfabrication and nanotechnology : Marc J. Madou. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Tipo de material: TextoIdioma: Inglés Detalles de publicación: Boca Raton : CRC Press, c2012.Edición: Third editionDescripción: xiii, 641 pages : illustrations (some colors) ; 29 cmISBN:- 9781420055115 (V. I)
- 9781420055191 (V. II)
- 9781420055160 (V. III)
- 620.5 23
Tipo de ítem | Biblioteca actual | Signatura | Copia número | Estado | Fecha de vencimiento | Código de barras | Reserva de ítems | |
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Colección general | Biblioteca Yachay Tech | 620.5 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 1 V.II | Disponible | 005060 | |||
Colección general | Biblioteca Yachay Tech | 620.5 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 1 V.III | Disponible | 005043 | |||
Colección general | Biblioteca Yachay Tech | 621 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 1, V. I | Disponible | 000924 | |||
Colección general | Biblioteca Yachay Tech | 620.5 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 2 V.II | Disponible | 005061 | |||
Colección general | Biblioteca Yachay Tech | 620.5 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 2 V.III | Disponible | 005044 | |||
Colección general | Biblioteca Yachay Tech | 621 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 2, V. I | Disponible | 000923 | |||
Colección general | Biblioteca Yachay Tech | 620.5 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 3 V.III | Disponible | 005063 | |||
Colección general | Biblioteca Yachay Tech | 621 M183 2012 (Navegar estantería(Abre debajo)) | Ej. 3 V. I | Disponible | 000922 | |||
Colección general | Biblioteca Yachay Tech | 620.5 M1832f 2012 (Navegar estantería(Abre debajo)) | Ej. 3, Vol. II | Disponible | 005062 |
Includes bibliographical references and index.
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
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