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Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A. / editors, Mikhail R. Baklanov ... [et al.]. - Warrendale, Penn. : Cambridge ; New York : Materials Research Society ; Cambridge University Press, 2012. - ix, 127 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 1335 . - Materials Research Society symposia proceedings ; v. 1335. .

"Symposium O, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California"--P. ix.

Includes bibliographical references and indexes.

ISBN: 9781605113128 1605113123

LCCN: 2011276248

Nat. Bib. Agency Control No.: 015988681 Uk

Subjects--Topical Terms:
Interconnects (Integrated circuit technology)--Congresses.
Integrated circuits--Very large scale integration--Congresses.
Microelectronics--Congresses.
Nanoelectronics--Congresses.
Materials--Congresses.

LC Class. No.: TK7874.53 / .S965 2011

Dewey Class. No.: 621.3815