000 00823cam a22002297a 4500
008 100609s2010 nyua b 001 0 eng d
020 _a0387462619 (alk. paper)
020 _a9780387462615 (alk. paper)
020 _a9780387462622 (eISBN)
082 0 4 _a621.381
_222
100 1 _aLiu, Ai-Qun.
245 1 0 _aRF MEMS switches and integrated switching circuits :
_bdesign, fabrication and test /
_cAi Qun Liu ; chapter co-authors, Aibin Yu ... [et al.].
260 _aNew York :
_bSpringer,
_cc2010.
300 _ax, 269 p. :
_bill. ;
_c24 cm.
490 0 _aMEMS reference shelf
504 _aIncludes bibliographical references and index.
650 0 _aRadio frequency microelectromechanical systems.
650 0 _aSwitching circuits.
650 0 _aIntegrated circuits.
700 1 _aYu, Aibin.
942 _2ddc
_cLIBRO
999 _c1321