| 000 | 01081cam a22002417a 4500 | ||
|---|---|---|---|
| 008 | 100824s2011 nyua b 001 0 eng d | ||
| 020 | _a9781441960177 (alk. paper) | ||
| 020 | _a1441960171 (alk. paper) | ||
| 020 | _a9781441960184 (eISBN) | ||
| 020 | _a144196018X (eISBN) | ||
| 082 | 0 | 4 |
_a621.381 _222 |
| 100 | 1 | _aHartzell, Allyson L. | |
| 245 | 1 | 0 |
_aMEMS reliability / _cAllyson L. Hartzell, Mark G. da Silva, Herbert R. Shea ; Foreword by Stephen D. Senturia. |
| 260 |
_aNew York : _bSpringer, _cc2011. |
||
| 300 |
_axiii, 291 p. : _bill. ; _c25 cm. |
||
| 490 | 0 | _aMEMS reference shelf | |
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _aLifetime Prediction -- Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS -- In-Use Failures -- Root Cause and Failure Analysis -- Testing and Standards for Qualification -- Continuous Improvement: Tools and Techniques for Reliability Improvement. | |
| 650 | 0 |
_aMicroelectromechanical systems _xReliability. |
|
| 700 | 1 | _aDa Silva, Mark G. | |
| 700 | 1 | _aShea, Herbert R. | |
| 942 |
_2ddc _cLIBRO |
||
| 999 | _c1320 | ||