| 000 | 01272cam a2200361 a 4500 | ||
|---|---|---|---|
| 001 | 16759613 | ||
| 005 | 20150612162715.0 | ||
| 008 | 110502s2011 nyua b 001 0 eng d | ||
| 010 | _a 2011928695 | ||
| 020 | _a9781441971203 | ||
| 020 | _a1441971203 (hdbk. : acidfree paper) | ||
| 020 | _a9781441971210 (ebk.) | ||
| 020 | _a1441971211 (ebk.) | ||
| 035 | _a(OCoLC)ocn746178309 | ||
| 040 |
_aNhCcYBP _cN15 _dBTCTA _dYDXCP _dBWX _dIXA _dMUU _dUUS _dGZQ _dVRC _dDLC |
||
| 041 | _aeng | ||
| 042 | _alccopycat | ||
| 050 | 0 | 0 |
_aTK7875 _b.S56 2011 |
| 100 | 1 | _aWijesundara, Muthu B. J. | |
| 245 | 1 | 0 |
_aSilicon carbide microsystems for harsh environments / _cMuthu B.J. Wijesundara, Robert G. Azevedo. |
| 260 |
_aNew York : _bSpringer, _cc2011. |
||
| 300 |
_axv, 232 p. : _bill. ; _c24 cm. |
||
| 490 | 1 | _aMEMS reference shelf | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aSilicon carbide. | |
| 700 | 1 | _aAzevedo, Robert G. | |
| 830 | 0 | _aMEMS reference shelf. | |
| 906 |
_a7 _bcbc _ccopycat _d2 _encip _f20 _gy-gencatlg |
||
| 942 |
_2ddc _cLIBRO |
||
| 955 |
_bxh14 2013-03-26 z-processor _ixh14 2013-03-27 to Dewey |
||
| 955 |
_apc17 2011-05-02 _axh00 2011-12-21 to USPL/STM _axh06 2012-01-12 to STM |
||
| 999 | _c1304 | ||