| 000 | 02476cam a22003494a 4500 | ||
|---|---|---|---|
| 003 | BYT | ||
| 005 | 20170927115228.0 | ||
| 008 | 170927b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420055115 (V. I) | ||
| 020 | _a9781420055191 (V. II) | ||
| 020 | _a9781420055160 (V. III) | ||
| 040 |
_aBYT _cBYT |
||
| 041 | _aeng | ||
| 082 | 0 | 4 |
_a620.5 _223 |
| 100 | 1 |
_aMadou, Marc J. _92259 |
|
| 245 | 1 | 0 |
_aFundamentals of microfabrication and nanotechnology : _cMarc J. Madou. _bSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / |
| 250 | _aThird edition | ||
| 260 |
_aBoca Raton : _bCRC Press, _cc2012. |
||
| 300 |
_axiii, 641 pages : _billustrations (some colors) ; _c29 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _av. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications. | |
| 520 | _a"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- | ||
| 520 | _a"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"-- | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 2 | 0 | _aNanoelectromechanical systems. |
| 650 | 0 | _aMicrofluidics. | |
| 650 | 0 | _aSolid-state physics. | |
| 650 | 0 |
_aSistemas microelectromecánicos _92543 |
|
| 650 | 0 |
_aSistemas nanoelectromecánicos _92544 |
|
| 650 | 0 |
_aFísica del estado sólido _92545 |
|
| 942 |
_2ddc _cLIBRO |
||
| 999 | _c1103 | ||