Silicon carbide microsystems for harsh environments /
Wijesundara, Muthu B. J.
Silicon carbide microsystems for harsh environments / Muthu B.J. Wijesundara, Robert G. Azevedo. - New York : Springer, c2011. - xv, 232 p. : ill. ; 24 cm. - MEMS reference shelf . - MEMS reference shelf. .
Includes bibliographical references and index.
9781441971203 1441971203 (hdbk. : acidfree paper) 9781441971210 (ebk.) 1441971211 (ebk.)
2011928695
Microelectromechanical systems.
Silicon carbide.
TK7875 / .S56 2011
Silicon carbide microsystems for harsh environments / Muthu B.J. Wijesundara, Robert G. Azevedo. - New York : Springer, c2011. - xv, 232 p. : ill. ; 24 cm. - MEMS reference shelf . - MEMS reference shelf. .
Includes bibliographical references and index.
9781441971203 1441971203 (hdbk. : acidfree paper) 9781441971210 (ebk.) 1441971211 (ebk.)
2011928695
Microelectromechanical systems.
Silicon carbide.
TK7875 / .S56 2011