02476cam a22003494a 4500
BYT
20170927115228.0
170927b xxu||||| |||| 00| 0 eng d
9781420055115 (V. I)
9781420055191 (V. II)
9781420055160 (V. III)
BYT
BYT
eng
620.5
23
Madou, Marc J.
2259
Fundamentals of microfabrication and nanotechnology :
Marc J. Madou.
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Third edition
Boca Raton :
CRC Press,
c2012.
xiii, 641 pages :
illustrations (some colors) ;
29 cm.
Includes bibliographical references and index.
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics.
Solid-state physics.
Sistemas microelectromecánicos
2543
Sistemas nanoelectromecánicos
2544
Física del estado sólido
2545
ddc
LIBRO
0
0
ddc
0
0
Campus
Campus
2014-09-04
Compra, Yachay EP
014127
389.03
000924
1
1
621 M1832f 2012
000924
2021-01-18
2018-08-28
Ej. 1, V. I
LIBRO
0
0
ddc
0
0
Campus
Campus
2014-09-04
Compra, Yachay EP
014128
389.03
000923
2
1
621 M1832f 2012
000923
2021-01-18
2016-04-14
Ej. 2, V. I
LIBRO
0
0
ddc
0
0
Campus
Campus
2014-09-04
Compra, Yachay EP
014129
389.03
000922
1
3
621 M183 2012
000922
2021-01-18
2018-03-03
Ej. 3 V. I
LIBRO
0
0
ddc
0
0
Campus
Campus
2016-01-01
Compra, Yachay EP
014129
389.00
005060
0
620.5 M1832f 2012
005060
2021-01-18
Ej. 1 V.II
2017-09-28
LIBRO
0
0
ddc
0
0
Campus
Campus
2016-01-01
Compra, Yachay EP
014129
389.00
005061
0
620.5 M1832f 2012
005061
2021-01-18
Ej. 2 V.II
2017-09-28
LIBRO
0
0
ddc
0
0
Campus
Campus
2016-01-01
Compra, Yachay EP
014129
389.00
005043
0
620.5 M1832f 2012
005043
2021-01-18
Ej. 1 V.III
2017-09-28
LIBRO
0
0
ddc
0
0
Campus
Campus
Compra, Yachay EP
014129
389.00
005044
0
620.5 M1832f 2012
005044
2021-01-18
Ej. 2 V.III
2017-09-28
LIBRO
0
0
ddc
0
0
Campus
Campus
2016-01-01
Compra, Yachay EP
014129
389.00
005063
0
620.5 M1832f 2012
005063
2021-01-18
Ej. 3 V.III
389.00
2017-09-28
LIBRO
0
0
ddc
0
0
Campus
Campus
2016-01-01
Compra, Yachay EP
014129
389.00
005062
0
620.5 M1832f 2012
005062
2021-01-18
Ej. 3, Vol. II
2018-01-08
LIBRO
1103