Fundamentals of microfabrication and nanotechnology : Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou.
By: Madou, Marc J
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Material type: 
BookCopyright date: Boca Raton : CRC Press, 2012Edition: Third edition.Description: xiii, 641 pages : illustrations (some colors) ; 29 cm.ISBN: 9781420055115 (Volumen I); 9781420055191 (Volumen II); 9781420055160 (Volumen III).Subject(s): Microelectromechanical systems | Nanoelectromechanical systems | Microfluidics | Solid-state physics | Sistemas microelectromecánicos | Sistemas nanoelectromecánicos | Física del estado sólidoDDC classification: 620.5 | Item type | Current location | Call number | Copy number | Status | Date due | Item holds |
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Libro académico
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Biblioteca del Campus | 620.5 M1832f 2012 (Browse shelf) | Ej. 1 V.II | Available | ||
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Libro académico
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Biblioteca del Campus | 620.5 M1832f 2012 (Browse shelf) | Ej. 1 V.III | Available | ||
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Libro académico
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Biblioteca del Campus | 621 M1832f 2012 (Browse shelf) | Ej. 1, V. I | Available | ||
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Libro académico
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Biblioteca del Campus | 620.5 M1832f 2012 (Browse shelf) | Ej. 2 V.II | Available | ||
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Libro académico
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Biblioteca del Campus | 620.5 M1832f 2012 (Browse shelf) | Ej. 2 V.III | Available | ||
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Libro académico
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Biblioteca del Campus | 621 M1832f 2012 (Browse shelf) | Ej. 2, V. I | Available | ||
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Libro académico
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Biblioteca del Campus | 620.5 M1832f 2012 (Browse shelf) | Ej. 3 V.III | Available | ||
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Libro académico
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Biblioteca del Campus | 621 M183 2012 (Browse shelf) | Ej. 3 V. I | Available | ||
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Libro académico
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Biblioteca del Campus | 620.5 M1832f 2012 (Browse shelf) | Ej. 3, Vol. II | Available |
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| 620.5 F681f 2012 Functional nanowires and nanotubes : | 620.5 H9668b 2011 Biomedical nanotechnology : | 620.5 M1832f 2012 Fundamentals of microfabrication and nanotechnology : | 620.5 M1832f 2012 Fundamentals of microfabrication and nanotechnology : | 620.5 M1832f 2012 Fundamentals of microfabrication and nanotechnology : | 620.5 M1832f 2012 Fundamentals of microfabrication and nanotechnology : | 620.5 M1832f 2012 Fundamentals of microfabrication and nanotechnology : |
Includes bibliographical references and index.
volumen 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- volumen 2. Manufacturing techniques for microfabrication and nanotechnology -- volumen 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications.
"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
"In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
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