MEMS reliability /
Hartzell, Allyson L.
MEMS reliability / Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea ; Foreword by Stephen D. Senturia. - New York : Springer, c2011. - xiii, 291 p. : ill. ; 25 cm. - MEMS reference shelf .
Includes bibliographical references and index.
Lifetime Prediction -- Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS -- In-Use Failures -- Root Cause and Failure Analysis -- Testing and Standards for Qualification -- Continuous Improvement: Tools and Techniques for Reliability Improvement.
9781441960177 (alk. paper) 1441960171 (alk. paper) 9781441960184 (eISBN) 144196018X (eISBN)
Microelectromechanical systems--Reliability.
621.381
MEMS reliability / Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea ; Foreword by Stephen D. Senturia. - New York : Springer, c2011. - xiii, 291 p. : ill. ; 25 cm. - MEMS reference shelf .
Includes bibliographical references and index.
Lifetime Prediction -- Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS -- In-Use Failures -- Root Cause and Failure Analysis -- Testing and Standards for Qualification -- Continuous Improvement: Tools and Techniques for Reliability Improvement.
9781441960177 (alk. paper) 1441960171 (alk. paper) 9781441960184 (eISBN) 144196018X (eISBN)
Microelectromechanical systems--Reliability.
621.381